Changzhou Galaxy Century Microelectronics Co., Ltd. is a high-tech enterprise specializing in the research and development, production, and sales of semiconductor discrete devices, with integrated business capabilities under the IDM model. The company's products are widely used in fields such as computers and peripheral devices, household appliances, adapters and power supplies, network communication, automotive electronics, industrial control, etc. The company was listed on the Shanghai Stock Exchange on January 27, 2021.
The semiconductor industry, as a high-tech industry, is often misunderstood as a "clean" industry. However, in fact, a large amount of organic and inorganic substances, including many toxic and harmful substances, are used in the semiconductor production process, which poses serious environmental hazards. If not controlled, it will result in significant environmental pollution. With the country's emphasis on environmental protection, the country and local governments have successively released emission standards for the semiconductor industry.
The exhaust gas generated during semiconductor production can be divided into general exhaust, acidic exhaust, alkaline exhaust, and organic exhaust based on the emission characteristics. The treatment methods vary depending on the characteristics of the exhaust gas.
Changzhou Galaxy Century Microelectronics Co., Ltd. mainly produces some acid alkali waste gas and Voc organic waste gas during production. For the acidic and alkaline waste gas generated in the semiconductor industry, due to the similar treatment principles, we use a waste gas washing tower system for treatment.
Under the action of the fan induced draft, the exhaust gas enters the bottom packing bed of the first stage washing tower and enters the equalizing chamber formed by the inner and outer jackets at low speed. It is transported by a circulating pump and washed in a reverse flow manner. The exhaust gas is evenly distributed around the PP Terry thorny ring packing layer, with each particle in point contact and arranged in an irregular "Z or W" path without bias flow. In addition, it is combined with a spiral high flow and non blocking nozzle, To achieve a gas-liquid two-phase mixing rate of over 97%, the washing tower mainly uses alkaline solution (depending on the actual situation on site) for neutralization and absorption treatment. In this way, the exhaust gas is purified again after being absorbed by a single or multi-stage water washing tower, and the final exhaust gas meets the national emission standards after treatment.
For the VOC organic waste gas generated in the semiconductor industry, we usually use methods such as direct incineration, organic activated carbon adsorption, and biological oxidation for treatment. For organic waste gases with higher concentrations, we recommend direct incineration, while for organic waste gases with lower concentrations, we usually use activated carbon adsorption for treatment.
We use activated carbon fiber adsorption method for this project, and its structure and working principle: the purifier is divided into an inlet section, a carbon fiber filtration section, and an outlet section. The filtering section is composed of several to dozens of filter cartridges. Organic waste gas enters the box from the inlet section and is adsorbed and purified by the filter cartridge. The purified air is discharged into the atmosphere through a fan.
