Overview

CRS type stainless steel silane combustion scrubber produced by our company is a waste gas purification equipment for the treatment of silane, ammonia and other soluble gases, mainly used to treat the waste gas produced by the solar cell production line industry and CVD chemical vapor deposition process.

The structure of this product is mainly composed of stainless steel shell, combustion system, washing system and slag cleaning system. In terms of air intake, compressed air plus fresh air intake is used to improve the efficiency and reliability of product operation. In the spray system, the method of combining circulating water pump and automatic water refill is adopted, and the fan is in the form of one use and one backup. These process characteristics make the product greatly guaranteed in terms of safety and reliability. The internal combustion chamber uses a special pressure relief device, which can work normally even when the internal pressure is suddenly increased, and it is equipped with a nitrogen inlet for greater safety. In terms of dust collection, the method of static pressure deposition is used, and the deposited dust is discharged through the slag discharge port, which makes the dust collection and treatment easier and more effective. Measured by authoritative departments, the removal rate of silane (SiH4) is ≥ 99.99%, and the purification rate of ammonia (NH3) and other water-soluble gases is as high as 99.99%.

The technical performance index of this product has reached the international advanced level of similar products, with good corrosion resistance, high mechanical strength, high purification efficiency, safety and reliability, low operating cost, low operating noise, easy operation and maintenance, reasonable structural design and other characteristics.

Control system and precautions

● Stainless steel silane combustion purification tower must ensure negative pressure of about 200Pa.

● An emergency combustion cylinder must be installed behind the vacuum pump of PECVD equipment (see the equipment flow chart).

● Stainless steel silane combustion purification tower must adopt a new process, double fan air extraction, one use one standby.

● The electric regulating valve of the fan inlet must be linked with the fan.

● A disc valve must be installed before the air inlet of the fan to control the negative pressure in the silane combustion purification device.

● Silane combustion purification device fresh air supply outlet must be equipped with a regulating valve.

● 1 ~ 1.5 meters outside the inlet pipe interface must be connected by a dismountable port to prevent the removal of debris from the combustion box.

Working principle

This product is made of high quality stainless steel raw materials, according to the characteristics of silane contact with air and spontaneous combustion, so that silane in the combustion chamber and air contact combustion, the gas after combustion through the packing layer and then into the combustion tower spray chamber, after spray treatment, so that the exhaust gas and the neutral circulation liquid contact reaction, and then into the dehydrator dehydrating treatment by the exhaust fan discharged into the atmosphere.

Technical parameter list